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浙江中科镭特电子有限公司

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Laser wafer grooving system

LTUF300S is a multifunctional and intelligent wafer laser automatic cutting system. The multi-function is reflected in the wafer cutting that can be used for a variety of surface materials such as low-k, WLP, etc. Intellectualization is reflected in this system, which is equipped with CCD image positioning system, automatic calibration system, follow-up system, full-automatic loading and unloading system and conventional application database automatic call system.
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1、 Highly reliable mass production system

Vibration resistant marble platform support structure
Femtosecond laser with low maintenance cost
Unique laser surface cutting technology
Automatic loading and unloading system
High precision and long-life motion platform
CCD positioning system makes machining intelligent
Precision ceramic microporous sucker
The automatic focusing system ensures the focus position of processing
Scientific structure ensures processing stability
Friendly user interface and powerful software

2、 Technical features

High performance laser

Imported femtosecond laser, with good beam quality, small focusing light shift and high cutting quality.
Ultra high cutting accuracy

High precision imported linear motor motion system, the cutting accuracy is controlled at the micron level.
Fully automatic positioning

Machine vision grabs mark points for positioning, with high accuracy, no manual intervention, simple operation and high efficiency.
Convenient processing of drawings and files

Cutting drawing files can be used only by using AutoCAD and other processing.
Marble structure

Full marble frame structure, shock absorption and isolation design, ensuring the stability of the light path and high-speed movement.
Laser protection system

The laser protection structure in line with industrial standards ensures the safety of operators.

 

Keyword:
Laser Wafer Grooving System
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Wafer laser automatic cutting system LTUF300S

 

Wafer scale

≤ φ12"

X/Y axis machining range (mm) 

310

X/Y Axis travel speed(mm/sec

Maximum speed 1000

X/Y Axis resolution(μm

0.1

X/Y Axis repeated positioning accuracy(μm

Full travel±1
 Z-axis machining range(mm) 

15

Z Axis resolution(μm

0.1

Z Axis repeated positioning accuracy(μm

±1

Processing galvanometer systemProcessing galvanometer system Digital high precision galvanometer
Fastest processing speed(mm/sec) 6000
Setting accuracy on work(μm)  1
Laser device femtosecond
laser power More than 15
Laser frequency More than 1
θ axis rotation range(°)

±190

θ Axis resolution(°)

0.0005

Complete machine power(kW)

6.5

Complete machine weight(kg)

2950

Complete machine size(mm) 

L 2500 x W 1500 x H 1900

 

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400-990-7528

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Contact: Yang Ying

Add:No. 218, Huaxi Road, Qiubin Street, Wucheng District, Jinhua City, Zhejiang Province

TEL:400-990-7528

E-mail :sales@zklt-tech.com

Fax:0579-82166682

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